%0 Journal Article
%T Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning
%A Haub, Michael
%A Bogner, Martin
%A Guenther, Thomas
%A Zimmermann, André
%A Sandmaier, Hermann
%J Sensors
%V 21
%N 11
%@ 1424-8220
%D 2021-05-30
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve