%0 Journal Article
%T Fluid-photoresist interactions and imaging in high-index immersion lithography
%A Tran, Hoang V.
%A Hendrickx, Eric
%A French, Roger H.
%J Journal of Micro/Nanolithography, MEMS and MOEMS
%V 8
%N 3
%P 033006-033006-9
%@ 1932-5150
%D 2009-07-01
%I SPIE
%~ DeepDyve