%0 Journal Article
%T Fabrication and Characterization of Ru Thin Films Prepared    by Liquid Delivery Metal-Organic Chemical Vapor Deposition
%A Kim, Kyoung-Won
%A Kim, Nam-Soo
%A Kim, Yeong-Seuk
%A Choi, Il-Sang
%A Kim, Ho-Joung
%A Park, Ju-Chul
%A Lee, Soun-Young
%J Japanese Journal of Applied Physics
%V 41
%N 2R
%@ 0021-4922
%D 2002-02-01
%~ DeepDyve