%0 Journal Article
%T Design method for wafer dicing machine base based on calculations
%A Tai, Au-Zou
%A Fang, Jiunn
%J Proceedings of SPIE
%V 12801
%P 1280166-1280166-6
%@ 0277-786X
%D 2023-10-25
%I SPIE
%~ DeepDyve