%0 Journal Article
%T Modeling scanner signatures in the context of OPC
%A Zhang, Qiaolin
%A Tyminski, Jacek K.
%A Lucas, Kevin
%J Proceedings of SPIE
%V 6730
%N 1
%P 673056-673056-12
%@ 0277-786X
%D 2007-10-05
%I SPIE
%~ DeepDyve