%0 Journal Article %T IR sensitivity enhancement of CMOS Image Sensor with diffractive light trapping pixels %A Yokogawa, Sozo %A Oshiyama, Itaru %A Ikeda, Harumi %A Ebiko, Yoshiki %A Hirano, Tomoyuki %A Saito, Suguru %A Oinoue, Takashi %A Hagimoto, Yoshiya %A Iwamoto, Hayato %J Scientific Reports %V 7 %N 1 %P 1-9 %D 2017-06-19 %I Nature Publishing Group UK %~ DeepDyve