%0 Journal Article
%T 34.5: Thermal Lithography for Flat Panel Display Manufacturing
%A Elizur, Eran
%A Gelbart, Dan
%J Sid Symposium Digest of Technical Papers
%V 33
%N 1
%@ 0097-966X
%D 2002-05-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve