%0 Journal Article
%T Improved photomask accuracy with a high-productivity DUV laser pattern generator
%A Öström, Thomas
%J Proceedings of SPIE
%V 6349
%N 1
%P 63490Y-63490Y-9
%@ 0277-786X
%D 2006-10-06
%I SPIE
%~ DeepDyve