%0 Journal Article
%T Analyzing semiconductor devices using modulation spectroscopy
%A Pollak, Fred H.
%A Qiang, Hao
%A Yan, Dong
%A Yin, Yichun
%A Krystek, Wojciech
%J JOM
%V 46
%N 9
%P 55-59
%@ 1047-4838
%D 1994-09-01
%I Springer-Verlag
%~ DeepDyve