%0 Journal Article
%T Study on sputtered a-Si:H for micro optical diffusion sensor using laser-induced dielectrophoresis
%A Kamata, Makoto
%A Yamada, Kan
%A Taguchi, Yoshihiro
%A Nagasaka, Yuji
%J Proceedings of SPIE
%V 9760
%P 97600P-97600P-6
%@ 0277-786X
%D 2016-03-15
%I SPIE
%~ DeepDyve