%0 Journal Article
%T Reaction Force Compensator for High-Speed Precision Stage of Laser Direct Imaging Process
%A Seo, Chang-hoon
%A Jeon, Yong ho
%A Lee, Hyung-ku
%A Kim, Hyo-young
%A Lee, Moon G.
%J Shock and Vibration
%V 2018
%P 9
%@ 1070-9622
%D 2018-06-19
%I Hindawi
%~ DeepDyve