%0 Journal Article
%T High-resolution nonfluorescent imaging with structured illumination for patterned surface measurement
%A Usuki, Shin
%A Shibata, Gaku
%A Miura, Kenjiro T
%J Measurement Science and Technology
%V 31
%N 8
%P 7
%@ 0957-0233
%D 2020-08-01
%~ DeepDyve