%0 Journal Article
%T In SEM a New Method of Internal Micrographic Visualization of Semiconductor Materials and IC by Crossing the Surface
%A Xiao, Ling
%A Liang, Zhuguan
%A Li, Yawen
%A Wang, Jian
%A Zhou, Kailin
%A Li, Ping
%A Xu, Xiaohua
%A Rau, EI
%A Hu, Wenguo
%J Microscopy and Microanalysis
%V 7
%N S2
%P 484-485
%@ 1431-9276
%D 2001-08-01
%~ DeepDyve