%0 Journal Article %T Reliability Express Control of the Gate Dielectric of Semiconductor Devices %A Solodukha, V. A. %A Chigir, G. G. %A Pilipenko, V. A. %A Filipenya, V. A. %A Gorushko, V. A. %A , %J Devices and Methods of Measurements %@ 2220-9506 %D 2018-12-17 %I Belarusian National Technical University %~ DeepDyve