%0 Journal Article
%T Surface defects generated by intrinsic origins on 4H-SiC epitaxial wafers observed by scanning electron microscopy
%A Matsuhata, Hirofumi
%A Sugiyama, Naoyuki
%A Chen, Bin
%A Yamashita, Tamotsu
%A Hatakeyama, Tetsuo
%A Sekiguchi, Takashi
%J Microscopy
%V 66
%N 2
%P 95-102
%@ 0022-0744
%D 2017-04-01
%I Oxford University Press
%~ DeepDyve