%0 Journal Article
%T 850-nm vertical-cavity surface-emitting lasers fabricated by H + inclined implantation using tungsten wire as mask
%A Du, Guotong
%A Chang, Yuchun
%J Proceedings of SPIE
%V 5594
%N 1
%P 164-169
%@ 0277-786X
%D 2004-12-20
%I SPIE
%~ DeepDyve