%0 Journal Article
%T Investigation of electron tunneling in ultra-precision machine tool for measuring the distance of tool and workpiece
%A Yoo, Handeul
%A Maeng, Sangjin
%J The International Journal of Advanced Manufacturing Technology
%V 136
%N 7
%P 3239-3248
%@ 0268-3768
%D 2025-02-01
%I Springer London
%~ DeepDyve