%0 Journal Article %T Electrical and thermal recording techniques using a heater integrated microprobe %A Lee, Dong Weon %A Ono, Takahito %A Esashi, Masayoshi %J Journal of Micromechanics and Microengineering %V 12 %N 6 %@ 0960-1317 %D 2002-11-01 %~ DeepDyve