%0 Journal Article %T Fuzzy adaptive optimal backstepping control of the FO MEMS resonator under imprecise target trajectory with disturbance compensation mechanism %A Zhao, Le %A Yang, Guanci %A Li, Yang %A Hu, Xuechun %J Nonlinear Dynamics %V 111 %N 19 %P 17939-17959 %@ 0924-090X %D 2023-10-01 %I Springer Netherlands %~ DeepDyve