%0 Journal Article
%T Fabrication of semitransparent multilayer polarizer and its application to soft x-ray ellipsometer
%A Haga, Tsuneyuki
%A Tinene, Marcia C. K.
%A Ozawa, Akira
%A Utsumi, Yuichi
%A Itabashi, Sei-ichi
%A Ohkubo, Takashi
%A Shimada, Masaru
%J Proceedings of SPIE
%V 3764
%N 1
%P 13-27
%@ 0277-786X
%D 1999-11-25
%I SPIE
%~ DeepDyve