%0 Journal Article %T A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer Structure %A Li, Zhipeng %A Meng, Xu %A Wang, Bonan %A Zhang, Chao %J Sensors %V 22 %N 7 %@ 1424-8220 %D 2022-03-29 %I Multidisciplinary Digital Publishing Institute %~ DeepDyve