%0 Journal Article
%T Bulk micromachining of a MEMS tunable Fabry-Perot interferometer: effect of residual silicon on device performance
%A Srivastava, Rohit
%A Gururaj Shenoy, U.
%A Forrest, Scott R.
%A Besser, Ronald S.
%A McShane, Michael J.
%J Journal of Micro/Nanolithography, MEMS and MOEMS
%V 3
%N 4
%P 579-588
%@ 1932-5150
%D 2004-10-01
%I SPIE
%~ DeepDyve