%0 Journal Article
%T Adapting immersion exposure to mass production by adopting a cluster of novel resist-coating/developing and immersion-exposure equipment
%A Fujiwara, Tomoharu
%A Kyoda, Hideharu
%J Proceedings of SPIE
%V 6519
%N 1
%P 65190C-65190C-10
%@ 0277-786X
%D 2007-03-16
%I SPIE
%~ DeepDyve