%0 Journal Article
%T Characterization of tunnel oxide passivated contact fabricated by sputtering and ion implantation technique
%A Yamaguchi, Noboru
%A Li, Shasha
%A Miyajima, Shinsuke
%J Japanese Journal of Applied Physics
%V 62
%N SK
%P 8
%@ 0021-4922
%D 2023-08-01
%I IOP Publishing
%~ DeepDyve