%0 Journal Article
%T In-plane stress development in sol–gel-derived titania and silica thin films on Si(100) substrates
%A Nakanishi, Shunsuke
%A Kojima, Ryohei
%A Kozuka, Hiromitsu
%J Journal of Sol-Gel Science and Technology
%V 93
%N 3
%P 506-516
%@ 0928-0707
%D 2020-03-30
%I Springer US
%~ DeepDyve