%0 Journal Article
%T Nanoimprint lithography methods for achieving sub-3nm overlay
%A Yamamoto, Kenji
%A Wada, Hideyuki
%A Suzaki, Yoshio
%A Sato, Kazuhiro
%A Iino, Satoshi
%A Jimbo, Satoru
%A Morimoto, Osamu
%A Hiura, Mitsuru
%A Roy, Nilabh
%A Cherala, Anshuman
%A Choi, Jin
%J Proceedings of SPIE
%V 11855
%P 1185509-1185509-10
%@ 0277-786X
%D 2021-10-12
%I SPIE
%~ DeepDyve