%0 Journal Article %T Contact Properties of Pt / RuO2 / Ru Electrode Structure Integrated on Polycrystalline Silicon %A Choi, Eun‐Suck %A Hwang, Jun‐Sik %A Yoon, Soon‐Gil %J Journal of the Electrochemical Society %V 147 %N 6 %P 2340-2342 %@ 0013-4651 %D 2000-06-01 %~ DeepDyve