%0 Journal Article %T Electrical Properties of Aluminum Oxide Ceramics Film on a Metal %A Bakeev, I. Yu. %A Burachevsky, Yu. A. %A Dvilis, E. S. %A Zolotukhin, D. B. %A Yushkov, Yu. G. %J Inorganic Materials: Applied Research %V 12 %N 5 %P 1276-1280 %@ 2075-1133 %D 2021-09-01 %I Pleiades Publishing %~ DeepDyve