%0 Journal Article
%T Correlative characterization of plasma etching resistance of various aluminum garnets
%A Stern, Christian
%A Schwab, Christian
%A Kindelmann, Moritz
%A Stamminger, Mark
%A Weirich, Thomas E.
%A Park, Inhee
%A Hausen, Florian
%A Finsterbusch, Martin
%A Bram, Martin
%A Guillon, Olivier
%J Journal of the American Ceramic Society
%V 107
%N 11
%P 7105-7118
%@ 0002-7820
%D 2024-11-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve