%0 Journal Article
%T Improvement of critical dimension uniformity using machine learning
%A Ugajin, Kunihiro
%A Naka, Masato
%A Kanamitsu, Shingo
%J Proceedings of SPIE
%V 13177
%P 131770W-131770W-6
%@ 0277-786X
%D 2024-08-26
%I SPIE
%~ DeepDyve