%0 Journal Article
%T Surface Modification of Silicon Carbide Wafers Using Atmospheric Plasma Etching: Effects of Processing Parameters
%A Jin, Qi
%A Yuan, Julong
%A Zhou, Jianxing
%J Micromachines
%V 14
%N 7
%D 2023-06-29
%I MDPI
%~ DeepDyve