%0 Journal Article
%T Effects of the Size of Charged Nanoparticles on the Crystallinity of SiC Films Prepared by Hot Wire Chemical Vapor Deposition
%A Kim, Daseul
%A Kim, Du-Yun
%A Kwon, Ji-Hye
%A Hwang, Nong-Moon
%J Coatings
%V 10
%N 8
%@ 2079-6412
%D 2020-07-24
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve