%0 Journal Article
%T Diagnostics of process plasma used for the production of memristive devices
%A Cipo, J
%A Schlichting, F
%A Zahari, F
%A Gauter, S
%A Kohlstedt, H
%A Kersten, H
%J Journal of Physics: Conference Series
%V 1492
%N 1
%P 7
%@ 1742-6588
%D 2020-04-01
%~ DeepDyve