%0 Journal Article
%T Insights into the Atmospheric Pressure Plasma‐Enhanced Chemical Vapor Deposition of Thin Films from Methyldisiloxane Precursors
%A Fanelli, Fiorenza
%A Lovascio, Sara
%A d'Agostino, Riccardo
%A Fracassi, Francesco
%J Plasma Processes and Polymers
%V 9
%N 11‐12
%P 1132-1143
%@ 1612-8850
%D 2012-12-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve