%0 Journal Article
%T Formation of biocompatible surface layers depending on the sputtering distance
%A Nasakina, E O
%A Seregin, A V
%A Baikin, A S
%A Kaplan, M A
%A Konushkin, S V
%A Sergiyenko, K V
%A Kovaleva, E D
%A Kolmakova, A A
%A Leonov, A V
%A Sevost’yanov, M A
%A Kolmakov, A G
%A Simakov, S V
%A ,
%J Journal of Physics Conference Series
%@ 1742-6588
%D 2017-05-01
%I IOP Publishing
%~ DeepDyve