%0 Journal Article
%T Initial performance results for high-aspect ratio gold MEMS deformable mirrors
%A Fernández, Bautista
%J Proceedings of SPIE
%V 7209
%N 1
%P 72090O-72090O-10
%@ 0277-786X
%D 2009-02-12
%I SPIE
%~ DeepDyve