%0 Journal Article
%T Electrolyte Composition for Cu Electrochemical Mechanical Planarization
%A Tripathi, Abhinav
%A Burkhard, Craig
%A Suni, Ian Ivar
%A Li, Yuzhuo
%A Doniat, Francois
%A Barajas, Alex
%A McAndrew, James
%J Journal of the Electrochemical Society
%V 155
%N 11
%P H918-H922
%@ 0013-4651
%D 2008-09-25
%~ DeepDyve