%0 Journal Article %T Nanotribology and MEMS %A Kim, Seong H. %A Asay, David B. %A Dugger, Michael T. %A , %J Nano Today %V 2 %N 5 %P 22-29 %@ 1748-0132 %D 2007-10-01 %I Elsevier BV %~ DeepDyve