%0 Journal Article
%T AlN MEMS filters with extremely high bandwidth widening capability
%A Gao, Anming
%A Liu, Kangfu
%A Liang, Junrui
%A Wu, Tao
%J Microsystems & Nanoengineering
%V 6
%N 1
%D 2020-09-07
%I Nature Publishing Group UK
%~ DeepDyve