%0 Journal Article %T An auto-focusing system for white light microscopic measurement %A Chang, Ming %A Deka, Juti Rani %A Chen, Pei Jung %A Chen, Yu Kuan %A Cui, Changcai %J Proceedings of SPIE %V 7130 %N 1 %P 71302T-71302T-6 %@ 0277-786X %D 2008-12-17 %I SPIE %~ DeepDyve