%0 Journal Article
%T Hotspot discovery and variability analysis for advanced EUV processes
%A Sah, Kaushik
%A Chen, Zhijin
%A Zhang, Yao
%A Zhang, Liming
%A Zhang, Cao
%A Higgins, Craig
%A Burov, Anatoly
%A Parsey, Guy
%A Vukkadala, Pradeep
%A Gronheid, Roel
%A Jain, Arpit
%A Ramini, Ramakanth
%A Agrawal, Ankur
%A Sharma, Garima
%A Cross, Andrew
%A Roy, Syamashree
%A Blanco, Victor
%J Proceedings of SPIE
%V 12955
%P 129553H-129553H-7
%@ 0277-786X
%D 2024-04-10
%I SPIE
%~ DeepDyve