%0 Journal Article
%T Controlled sequence peptoids as photoresist platforms for high-resolution DUV/EUV photoresists
%A Meng, X. Zoey
%A Käfer, Florian H.
%A Wallraff, Gregory M.
%A Ober, Christopher K.
%A Segalman, Rachel A.
%J Proceedings of SPIE
%V 12292
%P 122920Q-122920Q-6
%@ 0277-786X
%D 2022-12-01
%I SPIE
%~ DeepDyve