%0 Journal Article
%T Ion-beam-sputtering deposition and etching of high-T c YBCO superconducting thin films
%A Zhao, Xing-Rong
%J Proceedings of SPIE
%V 1519
%N 1
%P 772-774
%@ 0277-786X
%D 1991-11-01
%I SPIE
%~ DeepDyve