%0 Journal Article
%T Characterizing electron beam induced damage in metrology and inspection of advance devices
%A Mohtashami, Abbas
%A Navarro, Violeta
%A Sadeghian, Hamed
%A Englard, Ilan
%A Shemesh, Dror
%A Malik, Nitin Singh
%J Proceedings of SPIE
%V 10446
%P 104460U-104460U-7
%@ 0277-786X
%D 2017-06-26
%I SPIE
%~ DeepDyve