%0 Journal Article
%T Etch durable spin-on hard mask
%A Muramatsu, Makoto
%A Iwashita, Mitsuaki
%A Kondo, Takashi
%A Hirose, Hisashi
%A Fujimoto, Seiji
%J Proceedings of SPIE
%V 7972
%N 1
%P 797226-797226-6
%@ 0277-786X
%D 2011-03-17
%I SPIE
%~ DeepDyve