%0 Journal Article %T SiC trench MOSFET with dual shield gate and optimized JFET layer for improved dynamic performance and safe operating area capability %A Zhang, Jin-Ping %A Chen, Wei %A Chen, Zi-Xun %A Zhang, Bo %J Chinese Physics B %V 32 %N 11 %P 8 %@ 1674-1056 %D 2023-10-01 %I Chinese Physical Society and IOP Publishing Ltd %~ DeepDyve