%0 Journal Article
%T Effect of Annealing Conditions on Recovery of Lattice Damage in a High-Energy-Implanted 4H-SiC Superjunction PIN Diode
%A Chen, Zeyu
%A Liu, Yafei
%A Peng, Hongyu
%A Cheng, Qianyu
%A Hu, Shanshan
%A Raghothamachar, Balaji
%A Dudley, Michael
%A Ghandi, Reza
%A Kennerly, Stacey
%A Thieberger, Peter
%J ECS Journal of Solid State Science and Technology
%V 11
%N 6
%P 7
%@ 2162-8769
%D 2022-06-01
%I IOP Publishing
%~ DeepDyve