%0 Journal Article
%T A novel DMTL capacitive switch with electrostatic actuation MAM capacitors
%A Deng, Cheng
%A Bao, Jingfu
%A Du, Yijia
%A Zhao, Xinghai
%J Microsystem Technologies
%V 18
%N 5
%P 537-541
%@ 0946-7076
%D 2012-03-22
%I Springer-Verlag
%~ DeepDyve