%0 Journal Article %T Investigation of a piezoelectric valveless micropump with an integrated stainless-steel diffuser/nozzle bulge-piece design %A Tseng, Li-Yu %A Yang, An-Shik %A Lee, Chun-Ying %A Cheng, Chiang-Ho %J Smart Materials and Structures %V 22 %N 8 %P 12 %@ 0964-1726 %D 2013-08-01 %~ DeepDyve