%0 Journal Article %T Nanoscale Ferromagnetic Cobalt‐Doped ZnO Structures Formed by Deep‐UV Direct‐Patterning %A Yeh, Chun‐Cheng %A Colis, Silviu %A Fioux, Philippe %A Zan, Hsiao‐Wen %A Berling, Dominique %A Soppera, Olivier %J Advanced Materials Interfaces %V 4 %N 22 %P n/a-n/a %@ 2196-7350 %D 2017-01-01 %I Wiley Subscription Services, Inc., A Wiley Company %~ DeepDyve